产品详情
| 纯度 , % | 99.99 | 99.999 |
| 氢气 | ≤0.1 ppmv | ≤0.1 ppmv |
| 氧气+氩气 | ≤35.0 ppmv | ≤0.5 ppmv |
| 氮气 | ≤35.0 ppmv | ≤2.0 ppmv |
| 四氟化碳 | ≤5.0 ppmv | ≤0.5 ppmv |
| 一氧化碳 | ≤4.0 ppmv | ≤0.1 ppmv |
| 二氧化碳 | ≤4.0 ppmv | ≤0.3 ppmv |
| 甲烷 | ≤4.0 ppmv | ≤0.1 ppmv |
| 六氟乙烷 | ≤40.0 ppmv | ≤2.0 ppmv |
| 八氟丙烷 | ≤10.0 ppmv | ≤1.0 ppmv |
| 水分 | ≤5.0 ppmv | ≤1.0 ppmv |
| 可水解氟化物 | ≤0.2 ppmv | ≤1.0 ppmv |
| 氢氟酸 | ≤0.2 ppmv | ≤0.1 ppmv |