产品详情
| 纯度 , % | 99.99 | 99.999 | 99.9999 |
| 氮气 | ≤20.0 ppmv | ≤2.0 ppmv | ≤0.2 ppmv |
| 氧气+氩气 | ≤5.0 ppmv | ≤1.5 ppmv | ≤0.2 ppmv |
| 氢气 | ≤2.0 ppmv | ≤0.5 ppmv | ≤0.1 ppmv |
| 一氧化碳 | ≤1.0 ppmv | ≤0.3 ppmv | ≤0.05 ppmv |
| 二氧化碳 | ≤1.0 ppmv | ≤0.4 ppmv | ≤0.05 ppmv |
| 甲烷 | ≤1.0 ppmv | ≤0.3 ppmv | ≤0.1 ppmv |
| 水分 | ≤5.0 ppmv | ≤2.0 ppmv | ≤0.1 ppmv |
| 氙气 | ≤50.0 ppmv | ≤2.0 ppmv | ≤0.1 ppmv |
| 四氟化碳 | ≤15.0 ppmv | ≤1.0 ppmv | ≤0.1 ppmv |