产品详情
| 纯度 , % | 99.999 | 99.9995 | 99.9999 |
| 氧气+氩气 | ≤1.0 ppmv | ≤0.5 ppmv | ≤250 ppbv |
| 氮气 | ≤4.0 ppmv | ≤0.5 ppmv | ≤300 ppbv |
| 一氧化碳 | ≤1.0 ppmv | ≤0.3 ppmv | ≤50 ppbv |
| 二氧化碳 | ≤1.0 ppmv | ≤0.5 ppmv | ≤100 ppbv |
| 甲烷 | ≤0.5 ppmv | ≤0.5 ppmv | ≤100 ppbv |
| 氯气 | ≤0.5 ppmv | ≤0.1 ppmv | ≤100 ppbv |
| 碳酰氯 | ≤1.0 ppmv | ≤0.1 ppmv | ≤100 ppbv |
| 氯化氢 | - | ≤3.0 ppmv | ≤1000 ppbv |
| 四氯化硅 | ≤3.0 ppmv | ≤2.0 ppmv | ≤100 ppbv |